MONTE CARLO SIMULATION OF CHARGED PARTICLE IN AN ELECTRONEGATIVE PLASMA

Auteurs-es

  • L SETTAOUTI Université d'Oran (USTO) BP.1505 Oran El-M'naouar Oran
  • A SETTAOUTI Université d'Oran (USTO) BP.1505 Oran El-M'naouar Oran
  • M SEBBANI Université d'Oran (USTO) BP.1505 Oran El-M'naouar Oran

Mots-clés :

Monte Carlo simulation, glow discharge, radio frequency, plasma

Résumé

Interest in radio frequency (rf) discharges has grown tremendously in recent years due to their importance in microelectronic technologies. Especially interesting are the properties of discharges in electronegative gases which are most frequently used for technological applications. Monte Carlo simulation have become increasingly important as a simulation tool particularly in the area of plasma physics. In this work, we present some detailed properties of rf plasmas obtained by Monte Carlo simulation code, in SF6

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Bibliographies de l'auteur-e

L SETTAOUTI, Université d'Oran (USTO) BP.1505 Oran El-M'naouar Oran

Département d'Electrotechnique

A SETTAOUTI, Université d'Oran (USTO) BP.1505 Oran El-M'naouar Oran

Département d'Electrotechnique

M SEBBANI, Université d'Oran (USTO) BP.1505 Oran El-M'naouar Oran

Département d'Electrotechnique

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Publié-e

2003-12-01

Comment citer

SETTAOUTI, L., SETTAOUTI, A., & SEBBANI, M. (2003). MONTE CARLO SIMULATION OF CHARGED PARTICLE IN AN ELECTRONEGATIVE PLASMA. Sciences & Technologie. A, Sciences Exactes, (20), 83–88. Consulté à l’adresse https://revue.umc.edu.dz/a/article/view/1070

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