MONTE CARLO SIMULATION OF CHARGED PARTICLE IN AN ELECTRONEGATIVE PLASMA
Mots-clés :
Monte Carlo simulation, glow discharge, radio frequency, plasmaRésumé
Interest in radio frequency (rf) discharges has grown tremendously in recent years due to their importance in microelectronic technologies. Especially interesting are the properties of discharges in electronegative gases which are most frequently used for technological applications. Monte Carlo simulation have become increasingly important as a simulation tool particularly in the area of plasma physics. In this work, we present some detailed properties of rf plasmas obtained by Monte Carlo simulation code, in SF6Téléchargements
Références
- S.W. Choi, G. Lucovsky and K.J. Bachmann, "Remote Plasma Enhanced Chemical Vapor Deposition of GaP with in situ Generation of Phosphine Precursors", J. Vac. Sci. Technol., B10(3), (1992), pp. 1070-1073.
- S.S. Nathan, G.M. Rao, S. Mohan, "Transport of Sputtered Atoms in Facing Targets Sputtering Geometry: A Numerical Simulation Study", J. Appl. Phys., 84(1), (1998), pp. 564-571.
- De-Zhen Wang, J.Q. Dong, "Kinetics of low pressure rf discharges with dust particles", J. Appl. Phys., 81(9), (1997), pp. 38-42.
- Z. Lj. Petrovic, F. Tochikubo, S. Kakuta, T. Makabe, "Spatiotemporal Optical Emission Spectroscopy of rf discharges in SF6", J. appl. Phys., 73(5), (1993), pp. 2163-2172.
- H.C. Sun, E.A. Whittaker, "Real-Time in situ Detection of SF6 in a Plasma Reactor", Appl. Phys. Lett., 63(8), (1993), pp. 1035-1037.
- S.B. Radovanov, B. Tomcik, Z. Lj. Petrovic, B.M. Jelenkovic, "Optical Emission Spectroscopy of rf Discharge in SF6", J. appl. Phys., 67(1), (1990), pp. 97-107.
- S.J. Kim, K. Shin, H.K. Park, "Dry Post-Etch Treatment Using SF6 Chemistry for 0.2 m Contact Hole", Jpn. J. Appl. Phys., 34(3A), (1995), pp. 5001-5005.
- K. Nagaseki, I. Ishikawa, E. Nishimura, Y. Saito, S. Suganomata, "Negative Ions in 13.56 MHz discharge of SF6 gas in a Planar Diode", Jpn. J. Appl. Phys., Vol. 34, (1995), pp. L852-L855.
- K. Nagaseki, H. Kobayashi, I. Ishikawa, E. Nishimura, Y. Saito, S. Suganomata, "Mass Spectrometry of Discharge Products at 13.56 MHz in SF6 Gas", Jpn. J. Appl. Phys., 33(7B), (1994), pp. 4348-4352.
- H. Nakayama, M. Onoda, T. Nishida, T. Kubota, H. Kamatani, K. Watabe, "Creeping Discharge Characteristics under Rectangular Pulse Voltage in SF6 Gas", Jpn. J. Appl. Phys., 35(7), (1996), pp. 4079-7080.
- D.M. Xiao, X.G. Li, X. Xu, "Swarm Parameters in SF6 and CO2 Gas Mixtures", J. Phys. D: Appl. Phys., 34, (2001), pp. L133-L135.
- M.J. Grapperhaus, M.J. Kushner, "A Semianalytic Radio Frequency Sheath Model Integrated into a two dimensional Hybrid Model for Plasma Processing Reactors", J. Appl. Phys., 81(2), (1997), pp. 569-577.
- W. Helin, L. Zuli, L. Daming, "Monte Carlo Simulation for Electron Neutral Collision Processes in Normal and Abnormal Discharge Cathode Sheath Region", Vacuum, 47(9), (1996), pp. 1065-1072.
- A. Settaouti, A. Mimouni, "Monte Carlo Simulation of Electron Swarms in SF6 in Uniform Electric Fields", The Third International Conference on Computational Aspects and Their Applications in Electrical Engineering, ''CATAEE'99'', Philadelphia University, Jordan, 19-20 Oct. (1999), pp. 123-128.
- A. Settaouti, L. Aouabdi, "Monte Carlo Simulation of Electron Swarms in Nitrogen in Uniform Electric Field", 4th Jordanian International Electric & Electronics Engineering Conference 2001 (JIEEEC'2001), Amman-Jordan, 16-18 April (2001), pp. 265-269.
- T.R. Hayes, R.C. Wetzel and R.S. Freund, "Absolute Electron -impact-ionization Cross Section Measurement of the Halogen Atoms", Phys. Rev., 35(2), (1987), pp. 578-584.
- G. Peach, "Ionization of Neutral Atoms with Outer 2P, 3S, and 3P Electrons by Electron and Proton Impact", J. Phys. B: Atomic Molec. Phys., Vol. 3, (1970), pp. 328-349.
- G. Peach, "Ionization of Atoms and Positive Ions by Electron and Proton Impact", J. Phys. B: Atomic Molec. Phys., Vol. 4, (1971), pp. 1670-1677.
- H. Itoh, Y. Miura, N. Ikuta, Y. Nakao and H. Tagashira, "Electron Swarm Development in SF6 I: Boltzmann Equation Analysis", J. Phys. D: Appl. Phys., Vol. 21, (1988), pp. 922-930.
- A.H. Sato, M.A. Lieberman, "Electron-Beam Probe Measurement of Electric Fields in rf Discharges", J. Appl. Phys., 68 (12), (1990), pp. 6117-6124.
- F. Becker, I.W. Rangelow, R. Kassing, "Ion Energy Distributions in SF6 Plasmas at a Radio-Frequency Powered Electrode", J. Appl. Phys., 80 (1), (1996), pp. 56-65.
